The Smart Ellipsometer is a new type of ellipsometer that combines two complementary techniques (spectroscopic ellipsometry and reflection anisotropy spectroscopy) to allow a wider range of applications and enhanced sensitivity to surface processes.
Reflection anisotropy spectroscopy (RAS) is extremely sensitive to surface structure and properties of anisotropic systems such as those observed in the fabrication of liquid crystal displays.
There are limitations in the sensitivity of ellipsometers to surface processes, but the combination of the ellipsometer and the RAS spectrometer allow surface specific measurements of samples to be made.
As these two techniques use similar components, the technology developed during this research allows the two techniques to be carried out on a single piece of apparatus.
The technology could also be ‘retro fitted’ as part of an upgrade to existing systems.
Key Benefits
- Standard ellipsometer features
- Enhanced surface sensitivity
- Combines two techniques in one device
- Compatible with existing equipment
- Provides real-time measurements
- Easier measurement of anisotropic systems
- Could be added as part of an upgrade to existing systems
Applications
- Displays
- Thin films
- Photovoltaic and solar applications
- Optical biosensors
- Optoelectronics
IP Status
A prototype ‘off normal’ reflection anisotropy spectrometer exists, along with a collection of simulated results which demonstrate the principles. Work is on going to compare results taken on the custom-built equipment with commercial ellipsometers.
The technology is now available under a non-exclusive licence agreement within specific application areas from the University of Edinburgh.
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